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Reflectometers from SENTECH Instruments GmbH

Laser and spectroscopic ellipsometers and reflectometers by SENTECH Instruments GmbH measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multi‑layer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SENTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

The compact table top instruments comprises the ellipsometer/reflectometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended by a variety of options for any R & D and routine application.
Sentech products is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. For a large variety ofapplications predefined recipes are offered by SpectraRay/3 for spectroscopic ellipsometers.

Laser and spectroscopic ellipsometers and reflectometers by SENTECH Instruments GmbH measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multi‑layer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SENTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

The compact table top instruments comprises the ellipsometer/reflectometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended by a variety of options for any R & D and routine application.
Sentech products is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. For a large variety ofapplications predefined recipes are offered by SpectraRay/3 for spectroscopic ellipsometers.

Laser ellipsometers SENTECH Instruments GmbH

Highly accurate reference tool for refractive index and film thickness

Measurement of:  
thickness
refractive index
thin film thickness
extinction coefficient

Applications:  
anti-reflective (AR) coatings for crystalline silicon solar cells
single films
dielectric films
thin organic films
native oxides
double layer stacks
bulk materials

Highly accurate reference tool for refractive index and film thickness

Measurement of:  
thickness
refractive index
thin film thickness
extinction coefficient

Applications:  
anti-reflective (AR) coatings for crystalline silicon solar cells
single films
dielectric films
thin organic films
native oxides
double layer stacks
bulk materials

Spectroscopic ellipsometers SENTECH Instruments GmbH

Widest spectral range

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is applied in the near infrared, allowing an extension to3,500 nm at highest spectral resolution and speed.

Step Scan Analyzer principle:

The Step Scan Analyzer principle is a unique feature of the SENTECH spectroscopic ellipsometer family. During data acquisition, polarizer and wide band compensator are fixed to provide highest accuracy of the ellipsometric measurement.

NEW!

Ultrafast measurements in the near infrared

The SENresearch spectroscopic ellipsometer features FTIR ellipsometry in the near infrared. Based on the new SENTECH solution (psi, delta)- spectra are measured  in less than 10 seconds thereby accumulating more than 1000 wavelengths in a spectral range between 700-2500 nm wavelength. Spectral resolution of less than 1 nm can be achieved. 

The spectroscopic ellipsometer measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multi‑layer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SENTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

It represents the high end of SENTECH spectroscopic ellipsometers. The compact table top instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended by a variety of options for any R & D and routine application.

It is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. For a large variety ofapplications predefined recipes are offered by SpectraRay/3 for spectroscopic ellipsometers.

SpectraRay/3

SENTECH's proprietary ellipsometer software SpectraRay/3 comprises two modes of operation: recipe mode and interactive mode. The recipe mode allows for easy execution of repetitive applications. In interactive mode, ellipsometric measurements are enhanced by an interactive, guiding graphical user interface.

Large materials database and all applicable dispersion models are included. Multiple angle of incidence, multiple sample, and combined photometric measurements are supported by SpectraRay/3.

Widest spectral range

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is applied in the near infrared, allowing an extension to3,500 nm at highest spectral resolution and speed.

Step Scan Analyzer principle:

The Step Scan Analyzer principle is a unique feature of the SENTECH spectroscopic ellipsometer family. During data acquisition, polarizer and wide band compensator are fixed to provide highest accuracy of the ellipsometric measurement.

NEW!

Ultrafast measurements in the near infrared

The SENresearch spectroscopic ellipsometer features FTIR ellipsometry in the near infrared. Based on the new SENTECH solution (psi, delta)- spectra are measured  in less than 10 seconds thereby accumulating more than 1000 wavelengths in a spectral range between 700-2500 nm wavelength. Spectral resolution of less than 1 nm can be achieved. 

The spectroscopic ellipsometer measures thin film thickness, refractive index, extinction coefficient, and related properties of bulk materials, single layers, and multi‑layer stacks. Isotropic and anisotropic materials, surface and interface roughness as well as gradients can be analyzed. Furthermore, SpectraRay/3, SENTECH proprietary ellipsometer software, treats sample effects like depolarization, non-uniformity, scattering (Mueller-matrix), and backside reflection.

It represents the high end of SENTECH spectroscopic ellipsometers. The compact table top instrument comprises the ellipsometer optics, goniometer, sample platform, auto-collimating telescope, light source, and detection unit. It can be extended by a variety of options for any R & D and routine application.

It is focused on speed and accuracy for insitu and exsitu measurements of thin films wherever they are applied. Applications range from measuring on textured surfaces to determining the conductivity of TCO films, from insitu monitoring of deposition processes to offline mapping on large glass panels. For a large variety ofapplications predefined recipes are offered by SpectraRay/3 for spectroscopic ellipsometers.

SpectraRay/3

SENTECH's proprietary ellipsometer software SpectraRay/3 comprises two modes of operation: recipe mode and interactive mode. The recipe mode allows for easy execution of repetitive applications. In interactive mode, ellipsometric measurements are enhanced by an interactive, guiding graphical user interface.

Large materials database and all applicable dispersion models are included. Multiple angle of incidence, multiple sample, and combined photometric measurements are supported by SpectraRay/3.

Metrology for photovoltaics

Лазерные и спекроскопические эллипсометры серии PV производства SENTECH Instruments GmbH (Германия) для измерения в фотовольтаике. Приборы с возможностью проведения измерений пленок под различными углами разработаны для высокоточного измерения толщины и оптических характеристик просветляющих покрытий (коэффициент преломления, показатель поглащения) на поли- и монокристаллическом кремнии (on solar cell). Особенно SiNx на текстурированном кремнии, а также пассивирующие слои SiO2 и Al2O3.

Лазерные и спекроскопические эллипсометры серии PV производства SENTECH Instruments GmbH (Германия) для измерения в фотовольтаике. Приборы с возможностью проведения измерений пленок под различными углами разработаны для высокоточного измерения толщины и оптических характеристик просветляющих покрытий (коэффициент преломления, показатель поглащения) на поли- и монокристаллическом кремнии (on solar cell). Особенно SiNx на текстурированном кремнии, а также пассивирующие слои SiO2 и Al2O3.