The SENpro ellipsometer is the smart solution to spectroscopic ellipsometry applications. It features a goniometer with angles of incidence in 5 °-steps. Easy operation, rapid measurement, and intuitive data analysis are combined in a cost-effective design for measuring thickness and optical constants of single films and multilayer stacks.Cost-efficiency.
The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance.
Preset angle of incidence
The spectroscopic ellipsometer SENpro comprises a goniometer with preset angles of incidence in
Step Scan Analyzer principle
The unique Step Scan Analyzer principle is featured by SENpro. During data acquisition, polarizer and wide band compensator are fixed to provide highest accuracy of the ellipsometric measurement.
The spectroscopic ellipsometer SENpro features simple operation, measurement speed, and combined data analysis of ellipsometric measurements at different angles of incidence. It measures in the spectral range of