SENresearch 4.0

Widest spectral range and highest spectral resolution

The SENresearch 4.0 spectroscopic ellipsometer covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR). High spectral resolution is offered to analyse even thick films up to 200 µm thickness using FTIR ellipsometry.

No moving parts with SSA principle

There are no moving optical parts during data acquisition for best measurement results. The Step Scan Analyzer (SSA) principle is a unique feature of the SENresearch 4.0 spectroscopic ellipsometer.

Full Mueller matrix by innovative 2C design

The extension of the SSA principle by the innovative 2C design allows measuring the full Mueller matrix. The 2C design is a field upgradable and cost-effective accessory.

SpectraRay/4 comprehensive ellipsometry software

The SpectraRay/4 is the full-featured software package for advanced material analysis. SpectraRay/4 comprises the Interactive Mode for research with guided graphical user interface and the Recipe Mode for routine applications.

The SENresearch 4.0 is the new SENTECH spectroscopic ellipsometer. Every individual SENresearch 4.0 spectroscopic ellipsometer is a customer-specific configuration of spectral range, options and field upgradableaccessories.

SENresearch 4.0 uses fast FTIR ellipsometry for the NIR up to 2,500 nm or 3,500 nm, respectively. It provides broadest spectral range with best S/N ratio and highest, selectable spectral resolution. Silicon films up to 200 µm thickness can be measured. The measurement speed of FTIR ellipsometry compares to diode array configurations, which are also selectable up to 1,700 nm.

The new motorized Pyramid Goniometer features an angle range from 20 deg to 100 deg. Optical encoders ensure highest precision and long term stability of angle settings. The spectroscopic ellipsometer arms can be moved independently for scatterometry and angle resolved transmission measurements.

SENresearch 4.0 operates on the Step Scan Analyser (SSA) principle. The SSA decouples the intensity measurement from mechanical movement, thereby allowing to analyse even rough samples. All optical parts are at rest during data acquisition. Furthermore, the SENresearch 4.0 includes a fast measurement mode for mapping and in situ applications.

Customized ellipsometers of the SENresearch 4.0 can be configured for standard and advanced applications. Examples are dielectric layer stacks, textured surfaces, optical and structural (3D) anisotropic samples. Predefined recipes are provided for a large variety of applications.