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Technological equipment and systems
Technological equipment and systems
Technology equipment
Maskless lithography
Nanofabrication systems NanoFrazor
Mask Aligners
Photoresist coating and Developing (Lithography Process)
Plasma Etching (RIE, RIE-ICP, DRIE)
Plasma Deposition PECVD, ICPECVD
Atomic Layer Deposition Systems (ALD)
Plasma cleaning
PVD systems
LPCVD for Graphene and CNT growth
Space simulation
IC Decapsulation systems
SprayCVD, MOCVD, LPCVD
RTP
CMP an Planarization
Diffusion furnaces
Wafers and photomask cleanning
Wafer Mounter, Laminator, UV curing stations
Die Bonder-System from Paroteq
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Analytics and metrology
Reflectometers from SENTECH Instruments GmbH
Laser ellipsometers SENTECH Instruments GmbH
Spectroscopic ellipsometers SENTECH Instruments GmbH
Metrology for photovoltaics
3D Optical profilers-confocal microscope
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Production
facilities
Active Vibration Isolation Accurion
Gas boxes
Scrubbers
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