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Mask aligners

MDA-400LJ

Easy operation & Installation
Handling Substrates of Various sizes
Adopt UV-LED exposure module
UV-LED Life-time is long

Type Fully manual (Mask Aligner)
Mask size up to 5" x 5"
Substrate size piece to 4" dia
UV lamp & Power UV-LED & power supply
Uniform beam size 125mm dia
Beam Uniformity <±3%
Beam wavelength 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options etc.

MDA-400M-6

Easy operation & Installation
Handling Substrates of Various sizes
PLC control with Touch screen panel


Type PC / PLC control Manual (Mask Aligner)
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 350W & power supply
Uniform beam size 6.25" x 6.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
IR BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.

MDA-600S

Easy operation & Installation
PC Operation with PLC control
Compact size semi auto system
Image grab & Data log
More than 100 Program recipes


Type PC control semi auto
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 350W & power supply
Uniform beam size 6.25" x 6.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
CCD BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.

MDA-60MS

Easy operation & Installation
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes


Type PC control semi auto
Mask size up to 7" x 7"
Substrate size piece to 6" x 6"
UV lamp & Power 1kW & power supply
Uniform beam size 7.25" x 7.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15 ~ 25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y(Manual), z, θ (Motorized)
Options CCD BSA
UV Intensity meter
etc.
Frame Anti vibration table

MDA-80SA / MDA-12SA

Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
Microscope position control system
Enable Ceramic substrate for Bump

Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 13" x 13"
Substrate size piece to 12" x 12"
UV lamp & Power 2kW & power supply
5kW & Power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Frame Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.

MDA-40FA / MDA-80FA / MDA-12FA

Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Microscope position control system
Auto Align mark searching function

Type Full automatic (Mask Aligner)
Mask size up to 14" x 14"
Substrate size 12" circle
UV lamp & Power 5kW lamp & power supply
Uniform beam size 13.25" x 13.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 25~60mW/cm2 (5kW)
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized)
Pre-aligner ±50um
Frame Anti-Vibration system
Options UV Intensity meter
etc.