+7 (495) 909-89-53

Plasma cleaning

Yocto (low cost system)

The Yocto III unit is mainly used for the following applications:

  • Cleaning
  • Activation

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458/999 31-0 

Basic Equipment

- Power supply: 230 V / 50 – 60 Hz

Gas Supply

- One process gas through filter
- Flow through valve (not adjustable)
- Ventilation through filter

Vacuum Chamber

- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm) 

Electrodes

- One pair of electrode on the outside of the vacuum chamber

Control

- Generator for plasma generation
- 2 step switch
- Start button
- Power switch 

Generator

- Frequency: 100 kHz
- Power 0 – 30 W

Vacuum Pump

- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m3/h

Zepto (low cost system)

2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:

  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • sterilisation
  • research and development
  • archaeology
  • textile treatment
  • semiconductor technology
  • plastic technology

Brochure ZEPTO (PDF 1034 KB) 

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC 

Gas supply

- Nadelventile
- Mass-Flow-Controller (MFCs) 

Vacuum chambers

-Quartzglass (UHP)
    round with cover
    (approx. Ø 105 mm, L 200 mm or L 300 mm)

Borosilicate glass (UHP)
    round with cover
    (approx. Ø 95 mm, L 200 mm or L 300 mm) 

Loading with

- flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass 

Electrodes

- One or multi level electrode

Control

- Manually
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPe

Timer

- Digital 

Generator

Frequencies:       40 kHz: Power 0 - 30 W; 0 - 100 W
                       13,56 MHz: Power 0 - 50 W

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)

ATTO (low cost system)

10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:

  • small scale production

  • analysis (SEM, TEM)

  • medical technology

  • sterilisation

  • research and development

  • archaeology

  • textile treatment

  • semiconductor technology

  • plastic technology

Technical Data: 

Plasma cleaner Atto

with manual control

switchgear cabinet:

W 425 mm, H 275 mm, D 450 mm

chamber:

glass, Ø 211 mm, L 300 mm

chamber volume:

approx. 10,5 litres

gas supply:

2 gas channels through needle valve 

generator:

40 kHz/200 W or 13.56 MHz/50 W fixed matching 

vacuum pump:

suction power: 2m³/h 
tray:

1 pc. tray 

control:

manual, process time by timer

Technical Data: 
Plasma cleaner Atto

with external PC control

(Windows XP)

Femto

The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Brochure FEMTO (PDF 1007 KB) 

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or 
   400 V AC / 3 phases for stand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

Stainless steel
    round with cover
    (approx. Ø 100 mm, L 278 mm oder L 600 mm) or
    rectangular with hinged door
    (approx. W 103 x H 103 x D 285 mm)

Aluminium
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 95 mm, L 280 mm or L 600 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- Semi automatic
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Timer

- Digital

Generator

  Frequencies:     40 kHz: Power 0 - 100 W; 0 - 1000 W
                       13.56 MHz: Power 0 - 50 W; 0 - 300 W
                         2.45 GHz: Power 0 - 100 W; 0 - 300 W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)

Pico

The PICO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Brochure PICO (PDF 1011 KB) 


Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 4 - 15 liters
- Power supply: 230 V AC for table top systems or 
   400 V AC / 3 phases forstand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

Stainless steel
    round with cover
    (approx. Ø 150 mm, L 320mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 160 x H 160 x D 325 mm or 600 mm)

Aluminium
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- Semi automatic
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer

- Digital

Generator

  Frequencies:     40 kHz: Power 0 - 200 W; 0 - 1000 W
                       13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W
                         2.45 GHz: Power 0 - 300 W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)

Nano

The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner

Brochure NANO (PDF 1068 KB) 

Basic configuration
- The outer body varies depending on the components / options
Chamber volume: depending on the version 18 - 36 liters
- Power supply: 230 V AC for table top systems or
   400 V AC/ 3 phases for stand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

Stainless steel
    round with cover
    (approx. Ø 267 mm, L 420mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 240 x H 240 x D 420 mm or 600 mm)

Aluminium
    round with cover or with hinged door
    (approx. Ø 240 mm, L 400 mm or L 600 mm)

Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 240 mm, L 400 mm or L 600 mm)

Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 240 mm, L 400 mm or L 600 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials, flat tray Aluminium,
  flat tray stainless steel, flat tray borosilicate glass,
  flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- Semi automatic
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer

- Digital

Generator

  Frequencies:     40 kHz: Power 0 - 300 W; 0 - 1000 W
                       13.56 MHz: Power 0 - 100 W; 0 - 300 W
                         2.45 GHz: Power 0 - 600 W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)

Tetra 30 / Tetra 100 / Tetra 150

The TETRA 150 plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Brochure TETRA 150 (PDF) 

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 150 liters
- Power supply: 230 V AC for table top systems or 
   400 V AC / 3 phases for stand alone systems

Gas supply

- Mass-Flow-Controller (MFCs)

Vacuum chambers

Stainless steel
    rectangular with hinged door
    (approx. W 400 x H 600 x D 625 mm)


Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer

- Digital

Generator

  Frequencies:    40 kHz: Power 0 - 1000 W; 0 - 1500 W, 0 - 2500W
                      13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000W
                        2.45 GHz: Power 0 - 1200W

  All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)

PlasmaBeam

PlasmaBeam – Atmospheric Plasma Processor for surface cleaning and/or activation is used for:

  • Plastics industry
  • Automotive industry
  • Electronic industry
  • Elastomer industry
  • Precision mechanics technology
  • Micro electromechanical Systems
  • Medical devices manufacturing
  • Solar cell technology
  • Research and development
  • Semiconductor technology
  • Optical industry

Technical Data
Plasma cleaner PlasmaBeam

1. Supply Unit:
(Desktop version)
W 562 mm, H 211 mm, D 420 mm
Weight: approx. 20 kg
(19" rack version)
W 420 mm, H 140 mm, D 580 mm
Weight: approx. 20 kg

2. Plasma Applicator:
Max. Ø 32 mm, L 270 mm
Weight: approx. 0,6 kg
Length of cable: 3 m 
(Special lengths on request)
Width of treatment: max. 12 mm

3. Generator:
Frequency: 20 kHz
Power: approx. 300 W

4. Connections:
Process and cooling gases: 
Dry, oil-free compressed air
Input pressure: 5,5-8 bar
Gas flow: approx. 2 m3/h
Power supply: 230 V/6 A / 50-60 Hz

5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply unit.