+7 (495) 909-89-53

PVD systems

COVAP

COVAP PVD PLATFORM

A compact, economical solution suitable for many process applications, the small size of the Covap II will ensure you can find space in your lab and in your budget.  Approximate substrate maximum: 75mm x 75mm.

NEXDEP

NEXDEP PVD PLATFORM

Incredible versatility with a compact footprint.  Myriad process applications and tools available, while remaining within budget.  It’s the perfect system for smaller substrates involved in the most advanced, recipe driven work. Approximate substrate maximum: 100mm x 100mm.

AMOD

AMOD PVD PLATFORM

Offering a chamber size larger than our Nexdep but smaller than our Evovac, the Amod offers a great balance between capability and budget.  Approximate substrate maximum: 150mm x 150mm.

EVOVAC

EVOVAC PVD PLATFORM

Our most capable PVD platform provides the largest chamber for multiple deposition sources, and the most modifiable process tools to ensure your specific research needs are being met precisely.  It’s the perfect tool for complex recipes that demand multiple sources and advanced deposition techniques.  Approximate substrate maximum: 150mm x 150mm.
Offering a chamber size larger than our Nexdep but smaller than our Evovac, the Amod offers a great balance between capability and budget.  Approximate substrate maximum: 150mm x 150mm.