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Spin coaters and developers

SPIN-1200T

Touch panel control
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl

Type Spin coater system
Substrate size piece ~ up to 4" circle
Rotation speed 300 ~ 10,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl size 8", P.P
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 230(D)x340(W)x260(H)

SPIN-3000D

Compact unit for various coating solutions
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl

Type Spin coater system
Substrate size piece ~ up to 6" circle
Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 390(D)x570(W)x280(H)

SPIN-3000A

Compact unit for various coating solutions
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl

Type Spin coater system
Substrate size piece ~ up to 8" circle
Rotation speed 300 ~ 8,000rpm(@without load) an error of less than 1%
AC Servo Motor(100W/400W)
Spin state 50steps, 20recipes (digital type)
Bowl size 12", Stainless steel
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A
Oiless vacuum pump pressure -650mmHg
Dimensions(mm) 390(D)x570(W)x400(H)

SPIN-4000A

Touch panel control
Easy operation
Adopt Drain, Exhaust hole in bowl

Type Spin coater system
Substrate size piece ~ up to 12" circle
Rotation speed Max. 5,000 rpm
AC Servo Motor
Spin state 20steps, 20recipes (digital type)
Acceleration / Deceleration rate Variable
Chuck material Anodized AL
Electric power 220V, 5A
Oilless vacuum pump pressure -650mmHg
Dimensions(mm) 650 x 945 x 1200
Options Number of Dispenser nozzle

SPIN-5000A, 7000A

Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl

Type Spin coater system
Substrate size piece ~ up to 12" circle / 500x500mm
Rotation speed 300 ~ 5,000rpm / ~2,000rpm (@without load) , Error rate ≤1%
AC Servo Motor
Spin state 50steps, 20recipes (digital type)
Bowl Stainless steel / Stainless steel, Chuck cover type
Acceleration / Deceleration rate Variable
Chuck material Anodized AL, Acetal
Electric power 220V, 5A / 10A
Oilless vacuum pump pressure -650mmHg
Dimensions (mm) Customized
Options Number of Dispenser nozzle
Type of chemical
Drain type
etc.

Spray coater MSC-150A

The MIDAS Spray Coater system is good for research and variable process of all applications. 
It represents next generation of full-field coating systems. 

Substrate size: up to 150х150 mm.
XY moving range: 200 x 200 mm.
Dimentions: 1200х1000х1600 mm.