+7 (495) 909-89-53


Heidelberg Instruments Mikrotechnik GmbH

Heidelberg Instruments History - 30 years experience 

1984 – 1990

  • Heidelberg Instruments GmbH is founded by researchers from the University of Heidelberg, European Molecular Biology Laboratory (EMBL) and other institutes with focus on multiple areas such as biomedical optics, confocal microscopy as well as wafer patterning and inspection.
  • Heidelberg Instruments Mikrotechnik GmbH became an independent company focused on integrated patterning tools for the semiconductor industry. 

1991 – 1995 

  • First DWL system is developed and installed in cooperation with INESC, Portugal and the Institute for Microelectronics, Stuttgart (IMS) under the umbrella of the European Strategic Program for Research and Development in Information Technology (ESPRIT).  Capabilities included direct patterning of CMOS layers with 1.2 μm node.  The system is called DWL 2.0.  First commercial system is installed at ML&C GmbH, Germany for photomask production.
  • Heidelberg Instruments installs the first large area exposure system capable of exposing an area of 800 x 800 mm with a resolution of 1 μm and an address grid of 25 nm at IMT, Switzerland.  
  • First system specifically designed for low volume, high precision direct patterning is developed for research institutes and universities.  This tool is called DWL 66, which is installed at the Imperial College of London.  The DWL 66 went through a number of modifications and today is one of the most successful maskless lithography systems within the R&D community with applications in MEMS, Micro-Optics, Life Sciences, as well as many other Nano and Micro technology related fields.

1996 – 2000 

  • Heidelberg Instruments enters an OEM agreement with Gerber System Corporation, a well-known supplier of laser imaging systems to the electronic industry.  The OEM agreement covered large area exposure systems and ends after Barco Graphics purchases the Gerber Systems Corporation.
  • As a proven brand name, the company enters the Asian market with multiple installations in Japan, China, Korea, Taiwan and Singapore.  Local offices responsible for after installation equipment and application support are established in Taiwan and China.
  • Heidelberg Instruments established the North America service office followed by the direct regional sales and marketing.  Today the North American region is an important market with over 80 customers, including large and small corporations as well as a number of research institutes and universities.

2001 – 2010

  • Heidelberg Instruments establishes additional service and support offices in Asia including local units in Korea and Japan due to increasing installations and market expansion in the region.  The company also announces construction of local process and application labs to support application and research development with other partners in the region.  
  • Introduction of the Volume Pattern Generator (VPG) line of large area lithography systems, a reliable and an economical solution, ideal for high volume production of today’s demanding photomasks in electronic packaging, color filters, and other applications requiring high resolution features on large areas with excellent image quality and registration. This technology remains a continuous success and has become an industry standard platform.
  • Introduction of the table top systems, the µPG 101, an extremely economical, small, integrated and easy to use micro pattern generator for applications such as MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution microstructure.

 2011 – 2013 

  • Heidelberg Instruments extends its leadership in manufacturing of direct write lithography systems with the launch of µPG 501 table top maskless aligner system.  Designed with the focus on high performance at an affordable price, the μPG 501 is the perfect solution for prototyping various devices such as MEMS, integrated Optics, micro-fluids, Lab-on-a-Chip.  Company is on track to eliminate the need for mask aligner and photomask usage specially in low volume production.
  • Introduction of the VPG 200/400 family of systems, our advanced small and midsize Maskless Aligner Systems. These systems represent over 2 decades of application and process experience in small area lithography combined with advanced and field proven technology used on our industry standard large area VPG (Volume Pattern Generator) platforms.  Due to the high exposure speed, the VPG 400and VPG 200 can be also used as a Maskless Aligner for direct exposure on wafers or any other flat substrates coated with photosensitive material eliminating the need for photomasks and mask aligners.
  • Expansion of the Process and Application Lab in Heidelberg, including addition of state of the art fabrication, measurement, and process equipment.  The company also announces plans to open additional state of the art Process and Application Labs in China and United States.
  • After several consecutive years of double-digit growth in order-intake, revenue and profit, Heidelberg Instruments announces 40% growth in 2013 order intake compared to 2012.

2013 – present 

  • RAG-Stiftung announces the execution of an agreement under which the RAG-Stiftung acquires 100 percent of Heidelberg Instruments. According to Dr. Helmut Linssen, CFO of the RAG-Stiftung, Heidelberg Instruments fits well into the investment strategy of the RAG-Stiftung, which invests into specialized, medium-sized companies in the fields of mechanical engineering, automation and industrial technologies, serving international growth segments.
  • With the introduction of the MLA Series, Heidelberg Instruments brings a new generation of Maskless Aligner Systems on the market. The MLA is a high performance maskless direct exposure system specifically designed for easy operation and high speed patterning. It offers all the capabilities of a traditional Mask Aligner for single layer and multi-layer applications and even overcomes some of the limitations of photomask based exposure technologies. The MLA eliminates the need for photomasks and shortens development cycles significantly.


MIDAS SYSTEM develops and produces Mask Aligner and Spin Coater equipment required by laboratories and companies related semi-conductor, MEMS, Bio element and Nano Technologies.

As for the mask aligner for wafer, we led the first development and commercialization in Korea, and continued to make up for the technologies in order to strengthen the basis as a technology centered company. Also the mask aligner for wafer is applicable for various fields and at present utilized in board fields such as the research and production of semi conductor, the research on the MEMS process and the production from MEMS applications, researched on bio chips and Nano technologies.

Midas System Produces and supplies the Mask aligner based on customized design to fit to demanded applications from domestic companies and research institutes, and also provides the related equipment necessary for process of semi conductor, in terms of considering conveniences of customers.

For all our customers, all our employees and managers at Midas System will do our best to become a world best company based on the confidence to produce more applicable and more efficient product for your researches and production.


SENTECH Instruments GmbH

SENTECH Instruments develops, manufactures, and sells worldwide advanced quality instrumentation for Plasma EtchingPECVDAtomic Layer Deposition, Thin Film Measurement (Spectroscopic EllipsometrySpectroscopic Reflectometry and Laser Ellipsometer) and Photovoltaics.

Angstrom Engineering Inc.

Angstrom Engineering was founded in 1992 and has quickly grown into a unique international company with a reputation for providing high-quality machines and unparalleled customer service. Our PVD (Physical Vapor Deposition), and CVD (Chemical Vapor Deposition) systems are created by our skilled and experienced engineering team.  We are proud to manufacture the tools that allow a wide variety of researchers and development teams in world-class labs across the globe to innovate new technologies.

All of our products are designed and assembled on-site by our engineers, technologists, and technicians. We provide ready access to our engineering team, so you can speak directly to someone with many years of experience if you need help to identify the correct system for your lab, have any questions or need support with your system at any point after purchase.

Diener electronics GmbH

Diener electronic was founded in 1993.

We are an innovative company in the field of plasma technology and an international leader in the production of low-pressure plasma systems, plasma HF generators and atmospheric plasma. Our technological maturity and resounding success guarantee continuous, global expansion. Each year, we build about 500 plasma systems, 6000 systems have been sold worldwide.

Our plasma systems are exported worldwide from Ebhausen.

  • Currently, approximately 100 people are employed by Diener electronic
  • In 2014, around 620 plasma systems were produced
  • Sales in 2014 amounted to approximately € 11 million
  • In 2014, we exhibited successfully at 9 trade fairs (Hannover Messe, MEDTEC, Sensor+Test, O&S, Bondexpo, FACHDENTAL, FAKUMA, IHK MTI Forum, electronica)


Annealsys designs and manufactures Rapid Thermal Processing / Rapid Thermal Annealing (RTP / RTA) and Chemical Vapor Deposition (DLI-CVD, DLI-ALD, MOCVD, RTCVD and Spray CVD) systems for research laboratories and companies for semiconductor, MEMS, nanotechnologies and photovoltaic applications.
The versatile RTP systems offer solutions for annealing, CVD of graphene and selenization for CIGS solar cells.
Annealsys provides high reliability and high quality tools and offers worldwide support and service excellence.

ATV Technologie

ATV was founded in 1972. 

In 1982 the PEO-601, the multi purpose, fast ramping bench top process furnace with quartz glass process tube was developed. It is suitable for 40 wafers, 100 mm. Some 200 have been sold world wide.

At the end of 1990 the PEO-602 and the 603 became ready for sale. It is suitable for maximum 50 wafers, 200 mm. Over 180 have been sold world wide. In 2006 the 300 mm furnace PEO-612 became available. In 2008 the PEO series got a new member, the PEO 604, designed for hazardous and complex processes, like LPCVD, Hydrogen annealing or wet oxidation. Already 25 are sold.

The applications for this PEO series furnaces range from wafer bump reflow, polyimide curing, SiAu, SiAl, SiMo alloying, post He implanting annealing, diffusion, LPCVD, wet/dry thermal oxidation, thick film paste firing, to Si epitaxy. Based on the PEO-603 a LTCC sintering press was made and sold several times now.  

At the beginning of 1990 the perfect soldering system/RTA, a lamp based cold wall multi purpose thermal processing system was developed: the SRO series. Some 400 systems have been sold so far. The applications vary form void free die attachment, package sealing, AuGe alloying on GaAs, SiAu alloying, wafer bump reflow, CSP, MEMs, IGBT, rapid thermal annealing to BCB curing. Most of them are installed in production and process engineering of highly sophisticated products.

Based on this cold wall thermal processing system the Atomic Layer Deposition system was developed.

ATV is currently some 30 people.

ATV is an engineering company assembling the parts supplied from external vendors. This keeps us very flexible to respond to customer’s demands. Nearly all system shipped are customized...


SVCS Process Innovation, company established in 2000 and based in the Czech Republic, designs and manufactures batch horizontal furnaces for the semiconductor and photovoltaic industry. The furnaces for atmospheric, LPCVD and PECVD processes, are outstanding because of the quality of selected components, long term experience of our engineers, and competitive prices. The key features include high process uniformity, large production capacity, reduced maintenance and a state-of-the-art control system with a customized and an easy-to-use user interface. This proprietary control system can be used both for a new or refurbished equipment Other products include various UHP gas systems like source gas cabinets, valve manifold boxes, gas sticks and various equipment gas systems.

Our experience is based on a long history of the semiconductor industry in former Czechoslovakia, continued by Motorola SCG and finally by ON Semiconductor, where we have our largest installation base.

Since 2004 SVCS gradually expanded to international markets and established branch offices in Moscow, Russia and Sarasota (FL), USA. In addition, technical service centres with skilled equipment and process engineers support promptly and continuously our customers in China, Taiwan, Malaysia and Singapore.

Step by step SVCS has grown to a strong company well known to customers in semiconductor and PV industries as well as to educational, R&D and scientific institutes. In 2009 SVCS was awarded with HSBC/DHL Export Prize as a best exporter of the year in the SME segment.


Alpsitec  (Франция) -  CMP machines manufacturer
Alpsitec CMP is a semiconductor equipment and technology company. Our main activity is the design, production and installation of machines for chemical mechanical planarization of silicon wafers. Our machines are well known and enjoy an excellent reputation by our customers : universities, research institutes and industrial customers.

Nikon Instruments

NIKON INSTRUMENTS INC. — компания-производитель научного оптического оборудования, входящая в корпорацию NIKON — одного из мировых гигантов оптического приборостроения, имеющего почти 90-летнюю историю работы на этом рынке. NIKON  INSTRUMETNS INC. специализируется на производстве оптических и опто-электронных приборов, а также программного обеспечения для биомедицинских, промышленных, информационных и др. отраслей. Благодаря высочайшему качеству оборудования, а также возможности предложить заказчику комплексное решение его задач, продукция NIKON INSTRUMETNS INC. занимает лидирующие положение не только в Азии, но и по всему миру.

NIKON является неоспоримым лидером в производстве промышленных систем литографии (степперы), оптических микроскопов (стерео микроскопы, металлографические микроскопы (прямые и инвертируемые), инспекционные микроскопы в электронике и полупроводниковом производстве, поляризационные микроскопы, измерительные микроскопы и видеоизмерительные системы, конфокальные измерительные микроскопы, профильные проэкторы).


JEOL Group Companies have been conducting business in three segments: “Scientific and Metrology Instruments”, “Industrial Equipment”, “Medical Equipment”. The major products are as follows. 

Transmission Electron Microscope, Energy Filter Electron Microscope, Electron Probe Microanalyzer, Auger Micro Probe, Photoelectron Spectrometer, Electron Microscope Peripherals. 

Nuclear Magnetic Resonance System, Electron Spin Resonance System, Mass Spectrometer,(Time-of-flight mass spectrometer, gas chromatograph mass spectrometer, liquid chromatograph mass spectrometer), portable gas chromatograph, gas monitor analyzer. 

Scanning Electron Microscope, Analytical Scanning Electron Microscope, Electron Microscope Peripherals, Multi Beam System, Focused Ion Beam System, Cross Section Polisher, Ion Slicer, X-ray Fluorescence Spectrometer. 

Electron Beam Lithography System (Variable Shaped Electron Beam Lithography), Electron Beam Lithography System (Spot Beam Lithography). 

Electron Beam Source & Power Supply of Electron Beam Deposition, High Power Electron Beam Source & Power Supply, Built-in Plasma Source & Power Supply, RF Power Supply for Plasma Generation, RF Induction Thermal Plasma System.


Since its inception in 1951, Rigaku has been at the forefront of analytical and industrial instrumentation technology. Today, with hundreds of major innovations to their credit, the Rigaku Group of Companies are world leaders in the fields of general X-ray diffraction (XRD), thin film analysis (XRF, XRD and XRR), X-ray fluorescence spectrometry (TXRF, EDXRF and WDXRF), small angle X-ray scattering (SAXS), protein and small molecule X-ray crystallography, Raman spectroscopy, X-ray optics, semiconductor metrology (TXRF, XRF, XRD and XRR), X-ray sources, computed tomography, nondestructive testing and thermal analysis.

With Rigaku's vast understanding of X-ray and its complementary technologies as a foundation, our true strength is seen in an unparalleled willingness to collaborate with customers. By promoting partnerships, dialog, and innovation within the global scientific and industrial communities, Rigaku demonstrates a relentless commitment to providing our client markets with fully integrated solutions.

The company and its employees are dedicated to developing and supplying universities, industry, and government labs with the ultimate in customer-focused integrated solutions across a wide variety of disciplines, including structural proteomics, nanoengineering research, general purpose X-ray diffraction (XRD) and spectroscopy (XRF), materials analysis and quality assurance.

Whether supplying the tools to create better semiconductor chips, enabling drug discovery, improving production line quality, or exploring the new frontier of nanotechnology, Rigaku products and services lead with innovation.

Rigaku employs over 1,100 people worldwide in operations based in Japan, the U.S., Europe and China. We value our people. Our value comes from them. Close collaboration between our users and employees sets the direction and focus of our work, allowing us to address customers' needs and stay close to the market place.


MPI Corporation was founded in July, 1995 and has enjoyed growth well beyond the industry standard due to an infusion between customer centricity, the latest technology development, advanced manufacturing techniques and world class customer support. In addition, having four vertical markets spanning across many different industries has enabled MPI steady growth.

MPI’s four main product markets include state of the art Probe Cards, Production LED Equipment, Advanced Semiconductor Test Equipment and Eco-minded Thermal Products.

The industries MPI serves include, but are not limited to Semiconductor, Materials Research, Aerospace, Automotive, Fiber Optic, Electronic Components, and more. The diversification of product portfolio and industries allows a healthy environment for employee growth and retention. Cross pollination of product technologies allows each new innovation to provide differentiation in areas that are meaningful to our precious customer base.

For years, enhancing our customer’s competitiveness is MPI’s primary target. This is only reached by continuous development of our local talent for the next generation of leadership while mixing in professional leadership, technical skills and investors from around the globe.

MPI is the only GTSM-listed probe card company in Taiwan


NANO-MASTER was founded in 1992 and it is a privately owned US company. NANO-MASTER started design and development of research tools in 2001 and focused on thin film applications. The first tool was a Sputtering System followed by a PECVD System and later a Wafer Cleaner. NANO-MASTER products are used in Semiconductor, MEMS, Optoelectronics, Nanotechnology and Photovoltaic applications. In less than ten years NANO-MASTER has established itself as a thin film equipment supplier around the world and sold more than 100 units in 20 countries primarily to universities, research centers and leading national laboratories.

SAES Pure Gas

SAES Pure Gas, Inc., a member of the SAES Getters Group, is the world leader in gas purification technology. SAES develops ultra-high pure gas-handling equipment, supplying gas purifiers for a wide range of bulk and speciality gas applications.

Located on the Central Coast of California, approximately half way between San Francisco and Los Angeles, our three-building facility serves as the world wide headquarters for the Pure Gas Technology Business Area of the SAES Getters Group.

SAES Pure Gas began production in 1989, with the introduction of the MonoTorr® gas purifier. As a pioneer in developing heated getter technology, SAES continues to set the standard for the market with its superior impurity capacities and longer purifier lifetimes. In order to meet individual customer requirements and the needs of an increasing technological market, SAES's extensive research and development has resulted in the largest portfolio of gas purifiers available for all gas purification needs. With the introduction of the ambient temperature MicroTorr® purifier and the MegaTorr® bulk gas purifier, SAES Pure Gas has models to satisfy a wide range of flow rates and gas applications.

SAES Pure Gas was founded in San Luis Obispo in 1989 to be the center of manufacturing for gas purifiers. At that time, two other product lines were also in production at this facility. Cryolab, the original company located here, produced vacuum insulated piping, cryogenic clean valves, and cryogenic components. The third product line originally produced at the San Luis Obispo facility was a line of Ultra-high Purity Gas Valves. By 1998, SAES had completely divested these products to focus solely on gas purification and analysis.

Now, the San Luis Obispo facility and staff are completely devoted to providing world wide support for the industry leading UHP gas purifier product line. SAES' philosophy of vertical integration has enabled us to uphold the highest standards of quality in every aspect of our business.

There are four complete labs:

  1. Purification material testing & development
  2. Purifier testing and customer site testing for ultra trace level impurities
  3. Final equipment inspection
  4. Final purifier testing with APIMS analysis

Electrical and mechanical assembly takes place in various stages - including a Class 10,000 clean room and a certified Class 100 cleanroom for precision UHP welding and critical component assembly. Our team takes tremendous pride in the work we do and the world class products we produce.