The Yocto III unit is mainly used for the following applications:
Vacuum Chamber
- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm)
Control
- Generator for plasma generation
- 2 step switch
- Start button
- Power switch
Generator
- Frequency: 100 kHz
- Power 0 – 30 W
Vacuum Pump
- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m3/h
The Yocto III unit is mainly used for the following applications:
Vacuum Chamber
- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm)
Control
- Generator for plasma generation
- 2 step switch
- Start button
- Power switch
Generator
- Frequency: 100 kHz
- Power 0 – 30 W
Vacuum Pump
- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m3/h
2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC
Generator
Frequencies:
40 kHz: Power 0 - 30 W; 0 - 100 W
13,56 MHz: Power 0 - 50 W
2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:
Basic configuration
- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC
Generator
Frequencies:
40 kHz: Power 0 - 30 W; 0 - 100 W
13,56 MHz: Power 0 - 50 W
10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:
small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology
chamber volume:
approx. 10,5 litres, glass, Ø 211 mm, L 300 mm
generator:
40 kHz/200 W or 13.56 MHz/200 W auto matching
10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:
small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology
chamber volume:
approx. 10,5 litres, glass, Ø 211 mm, L 300 mm
generator:
40 kHz/200 W or 13.56 MHz/200 W auto matching
Basic configuration
Electrodes
Generator
Basic configuration
Electrodes
Generator
Electrodes
- One or multi level electrodeFrequencies:
Electrodes
- One or multi level electrodeFrequencies:
Basic configuration
- Chamber volume: depending on the version 150 liters
Basic configuration
- Chamber volume: depending on the version 150 liters
Generator:
Frequency: 20 kHz
Power: approx. 300 W
5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply unit.
Generator:
Frequency: 20 kHz
Power: approx. 300 W
5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply unit.