Call back request

Contact person name*
Phone number*
* - required entries
+7 (495) 909-89-53
Call back
RU | EN
Main page » Equipment » Analytics and metrology » Metrology for photovoltaics » SE 800 PV

SE 800 PV

SENTECH designed the SE 800 PV for characterizing multilayers composed of SiNx / SiO2, SiNx / SiNy, or SiNx / Al2O3 as passivation and antireflective coatings. Refractive index, absorption and film thickness of the stacked layers are analysed on textured monocrystalline and multicrystalline silicon solar cells. The complex measurement is performed in the recipe mode, fast and easily.

Unambiguous thickness determination

The combination of ellipsometry and reflectometryallows for fast and unambiguous determination of the thickness of transparent films by automatic identifcation of the cyclic thickness period.

Largest measurement range

The combination of laser ellipsometer andreflectometry extends the thickness range for transparent films up to 25 µm and more depending on photometer option.

Push the limits of laser ellipsometry

The multiple angle manual goniometer with superior performance and angle accuracy allows measuring refractive index, extinction coefficient, and film thickness of single films and layer stacks.

The SE 500adv combines ellipsometry and reflectometry to eliminate the ambiguity of measuring layer thickness of transparent films. It extends the measureable thickness to 25 µm. Therefore the SE 500adv extends the capability of the standard laser ellipsometer SE 400adv especially for analyzing thicker films of dielectrics, organic materials, photoresists, silicon, and polysilicon.

The SE 500adv can be operated as laser ellipsometer, as film thickness probe, and as CER ellipsometer. Consequently, it offers maximum flexibility never reached by standard laser ellipsometers. Operated as  ellipsometer, single and multiple angle measurements can be performed. When operated as film thickness probe, the thickness of a transparent or weakly absorbing film is measured under normal incidence.

The combination of ellipsometry and reflectometry in the SE 500adv comprises the ellipsometer optics, goniometer, combined reflection measurement head and auto-collimating telescope, sample platform, HeNe laser source, laser light detection unit, and photometer.

The options of the SE 500adv support applications in microelectronics, microsystems technology, display technology, photovoltaics, chemistry, and others.

Hide
Hide
Hide

"MINATEH" — Micro and nano technology
© All rights reserved

phone/fax: +7 (495) 909-89-53 / +7 (495) 909-89-54
mobile: +7 (926) 134-69-15
e-mail: info@minateh.ru