Horizontal PECVD Furnace SVCS

Horizontal PECVD Furnace SVCS  

The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVpFUR-FP) and high flexibility small scale versions for use in research and pilot production (SVpFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform.

The SVCS design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.

PECVD Processes

• Silicon nitride (including anti-reflective SiN solar cell coating)
• Silicon oxide
• Oxinitride

Features and Benefits

• State of the art modular control system; in-house designed, highly tailored and in-house manufactured
• Top notch components always selected for excellent results and trouble free long life of the furnace equipment
• Up to 4 stacked quartz  tube reactor chambers for various procesess
• Multiple methods of vacuum control, heated or unheated
  • Throttling Butterfly Valve – TBV
  • N₂ ballast
  • Vacuum pump control with frequency converter
• Integration of vacuum pump system in cooperation with leading vacuum pump manufacturers
• Advanced water cooling tube level system: no thermal interference between different tubes
• On request integration of RF generators in cooperation with leading manufacturers
• Proprietary designed water cooled flanges
• Proprietary inhouse manufactured RF generators
• Proprietary designed inhouse assembled graphite wafer carriers
• Contactless fully automated boat-in-tube loading cantilever with proprietary ceramic incapsulated twin rod system
• Maintenance friendly mechanical design