Plasma cleaning

Yocto (low cost system)

The Yocto III unit is mainly used for the following applications:

Cleaning
Activation

Vacuum Chamber

- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm)

Control

- Generator for plasma generation
- 2 step switch
- Start button
- Power switch

Generator

- Frequency: 100 kHz
- Power 0 – 30 W

Vacuum Pump

- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m³/h

The Yocto III unit is mainly used for the following applications:

Cleaning
Activation

Vacuum Chamber

- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm)

Control

- Generator for plasma generation
- 2 step switch
- Start button
- Power switch

Generator

- Frequency: 100 kHz
- Power 0 – 30 W

Vacuum Pump

- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m³/h

Zepto (low cost system)

2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:

small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC

Generator

Frequencies:
40 kHz: Power 0 - 30 W; 0 - 100 W
13,56 MHz: Power 0 - 50 W

2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:

small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC

Generator

Frequencies:
40 kHz: Power 0 - 30 W; 0 - 100 W
13,56 MHz: Power 0 - 50 W

ATTO (low cost system)

10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:

small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology

chamber volume:

approx. 10,5 litres, glass, Ø 211 mm, L 300 mm

generator:

40 kHz/200 W or 13.56 MHz/200 W auto matching

10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:

small scale production
analysis (SEM, TEM)
medical technology
sterilisation
research and development
archaeology
textile treatment
semiconductor technology
plastic technology

chamber volume:

approx. 10,5 litres, glass, Ø 211 mm, L 300 mm

generator:

40 kHz/200 W or 13.56 MHz/200 W auto matching

Femto

The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 1,9 - 6 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Generator

Frequencies:
40 kHz: Power 0 - 100 W; 0 - 1000 W
13.56 MHz: Power 0 - 200 W
2.45 GHz: Power 0 - 100 W; 0 - 300 W

All generators are continuously adjustable from 0 - 100%

The FEMTO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 1,9 - 6 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Generator

Frequencies:
40 kHz: Power 0 - 100 W; 0 - 1000 W
13.56 MHz: Power 0 - 200 W
2.45 GHz: Power 0 - 100 W; 0 - 300 W

All generators are continuously adjustable from 0 - 100%

Pico

The PICO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 4 - 15 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Frequencies:

40 kHz: Power 0 - 200 W; 0 - 1000 W
13.56 MHz: Power 0 - 300W
2.45 GHz: Power 0 - 300 W

All generators are continuously adjustable from 0 - 100%

The PICO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 4 - 15 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Frequencies:

40 kHz: Power 0 - 200 W; 0 - 1000 W
13.56 MHz: Power 0 - 300W
2.45 GHz: Power 0 - 300 W

All generators are continuously adjustable from 0 - 100%

Nano

The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 18 - 36 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Generator

Frequencies:
40 kHz: Power 0 - 300 W; 0 - 1000 W
13.56 MHz: Power 0 - 300 W
2.45 GHz: Power 0 - 600 W

All generators are continuously adjustable from 0 - 100%

The NANO plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration

- Chamber volume: depending on the version 18 - 36 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Generator

Frequencies:
40 kHz: Power 0 - 300 W; 0 - 1000 W
13.56 MHz: Power 0 - 300 W
2.45 GHz: Power 0 - 600 W

All generators are continuously adjustable from 0 - 100%

Tetra 30 / Tetra 100 / Tetra 150

The TETRA 150 plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration
- Chamber volume: depending on the version 150 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Generator

Frequencies:
40 kHz: Power 0 - 1000 W; 0 - 1500 W, 0 - 2500W
13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000W
2.45 GHz: Power 0 - 1200W

All generators are continuously adjustable from 0 - 100%

The TETRA 150 plasma cleaner are available in many different configurations. The following is an overview of the most common plasma cleaner.

Basic configuration
- Chamber volume: depending on the version 150 liters

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Generator

Frequencies:
40 kHz: Power 0 - 1000 W; 0 - 1500 W, 0 - 2500W
13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000W
2.45 GHz: Power 0 - 1200W

All generators are continuously adjustable from 0 - 100%

PlasmaBeam

PlasmaBeam – Atmospheric Plasma Processor for surface cleaning and/or activation is used for:

Plastics industry
Automotive industry
Electronic industry
Elastomer industry
Precision mechanics technology
Micro electromechanical Systems
Medical devices manufacturing
Solar cell technology
Research and development
Semiconductor technology
Optical industry

Generator:
Frequency: 20 kHz
Power: approx. 300 W

5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply unit.

PlasmaBeam – Atmospheric Plasma Processor for surface cleaning and/or activation is used for:

Plastics industry
Automotive industry
Electronic industry
Elastomer industry
Precision mechanics technology
Micro electromechanical Systems
Medical devices manufacturing
Solar cell technology
Research and development
Semiconductor technology
Optical industry

Generator:
Frequency: 20 kHz
Power: approx. 300 W

5. Operating Modes:
Manual operation:
With the buttons "Plasma ON" and "Plasma OFF" on the front panel of the supply unit.
Semiautomatic:
Remote control through SUB-D 25-pin connector on the rear panel of supply unit.