- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1,9 - 6 liters
- Power supply: 230 V AC for table top systems or
400 V AC / 3 phases for stand alone systems
Gas supply
- Needle valve
- Mass-Flow-Controller (MFCs)
Vacuum chambers
-
Stainless steel round with cover (approx. Ø 100 mm, L 278 mm oder L 600 mm)
or rectangular with hinged door (approx. W 103 x H 103 x D 285 mm)
-
Aluminium round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)
-
Quartzglass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)
-
Borosilicate glass (UHP) round with cover or with hinged door (approx. Ø 95 mm, L 280 mm or L 600 mm)
Loading with
Tray (option: water-cooled), quartz glass boat,
rotary drum for powder, rotary drum for bulk materials,
flat tray Aluminium, flat tray stainless steel,
flat tray borosilicate glass, flat tray quartz glass
Electrodes
- One or multi level electrode
- RIE - electrode
Control
- Semi automatic
- PCCE-Control (Microsoft
Windows CE)
- PC-Control (Microsoft
Windows XPE)
Timer- Digital
Generator
Frequencies:
40 kHz: Power 0 - 100 W; 0 - 1000 W
13.56 MHz: Power 0 - 50 W; 0 - 300 W
2.45 GHz: Power 0 - 100 W; 0 - 300 W
All generators are continuously adjustable from 0 - 100%
Vacuum pump
- in different sizes from different manufacturers
(As required with active carbon filter)
