Diffusion furnaces

Laboratory table top Horizontal Diffusion Furnace (SVCS)

Ideally suited for R&D laboratories and pilot production

The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system can be used for wide range of processes due to outstanding flexibility and amount of optional modules available to meet special and often unique requirements of every customer.

The design of the SVCS atmospheric diffusion furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVaFUR-FP) and high flexibility small scale versions for use in research and pilot production (SVaFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform.

The SVCS design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.

Horizontal PECVD Furnace SVCS  

The design of the SVCS Plasma Enhanced Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVpFUR-FP) and high flexibility small scale versions for use in research and pilot production (SVpFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform.

Horizontal LPCVD Furnace from SVCS (Чехия).  

The design of the SVCS Low Pressure Chemical Vapor Deposition furnaces combines the multiple process capability with the needs of a maximum capacity for full production system (SVcFUR-FP) and high flexibility small scale versions for use in research and pilot production (SVcFUR-RD). It provides an easy-to-maintain, safe and reliable horizontal furnace platform.