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ATTO (low cost system)

10,5 litres laboratory low cost plasma cleaner ATTO with manual, PC and PCCE control is mainly used for:

  • small scale production

  • analysis (SEM, TEM)

  • medical technology

  • sterilisation

  • research and development

  • archaeology

  • textile treatment

  • semiconductor technology

  • plastic technology

Technical Data: 

Plasma cleaner Atto

with manual control

switchgear cabinet:

W 425 mm, H 275 mm, D 450 mm

chamber:

glass, Ø 211 mm, L 300 mm

chamber volume:

approx. 10,5 litres

gas supply:

2 gas channels through needle valve 

generator:

40 kHz/200 W or 13.56 MHz/200 W auto matching 

vacuum pump:

suction power: 2m³/h 
tray:

1 pc. tray 

control:

manual, process time by timer

Technical Data: 
Plasma cleaner Atto

with external PC control

(Windows XP)



 



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