- The outer body varies depending on the components / options
- Chamber volume: depending on the version 4 - 15 liters
- Power supply: 230 V AC for table top systems or 
   400 V AC / 3 phases forstand alone systems

Gas supply

- Needle valve
- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    round with cover
    (approx. Ø 150 mm, L 320mm or L 600 mm) or
    rectangular with hinged door
    (approx. W 160 x H 160 x D 325 mm or 600 mm)

- Aluminium
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

- Quartzglass (UHP)
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

- Borosilicate glass (UHP)
    round with cover or with hinged door
    (approx. Ø 130 mm, L 300 mm or L 600 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- Semi automatic
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer - Digital

Generator   Frequencies:     

40 kHz: Power 0 - 200 W; 0 - 1000 W
13.56 MHz: Power 0 - 50 W; 0 - 100 W; 0 - 300 W
2.45 GHz: Power 0 - 300 W

All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)