- The outer body varies depending on the components / options
- Chamber volume: depending on the version 150 liters
- Power supply: 230 V AC for table top systems or 
   400 V AC / 3 phases for stand alone systems

- Mass-Flow-Controller (MFCs)

Vacuum chambers

- Stainless steel
    rectangular with hinged door
    (approx. W 400 x H 600 x D 625 mm)

Loading with

  Tray (option: water-cooled), quartz glass boat,
  rotary drum for powder, rotary drum for bulk materials,
  flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass

Electrodes

- One or multi level electrode
- RIE - electrode

Control

- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPE)

Pressure measurement

- Pirani sensor
- Baratron (for the corrosive gas version)

Timer

- Digital

Generator

  Frequencies:    
40 kHz: Power 0 - 1000 W; 0 - 1500 W, 0 - 2500W
 13.56 MHz: Power 0 - 300 W; 0 - 600 W; 0 - 1000W
 2.45 GHz: Power 0 - 1200W

All generators are continuously adjustable from 0 - 100%

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)