2,6 litres laboratory low cost plasma cleaner ZEPTO with manual, PC and PCCE control is mainly used for:

• small scale production
• analysis (SEM, TEM)
• medical technology
• sterilisation
• research and development
• archaeology
• textile treatment
• semiconductor technology
• plastic technology

Brochure ZEPTO (PDF 1034 KB) 

Basic configuration

- The outer body varies depending on the components / options
- Chamber volume: depending on the version 1.7 - 2.6 liters
- Power supply: 230 V AC 

Gas supply

- Nadelventile
- Mass-Flow-Controller (MFCs) 

Vacuum chambers

-Quartzglass (UHP)
    round with cover
    (approx. Ø 105 mm, L 200 mm or L 300 mm)

- Borosilicate glass (UHP)
    round with cover
    (approx. Ø 95 mm, L 200 mm or L 300 mm) 

Loading with

- flat tray Aluminium, flat tray stainless steel,
  flat tray borosilicate glass, flat tray quartz glass 

Electrodes

- One or multi level electrode

Control

- Manually
- PCCE-Control (Microsoft Windows CE)
- PC-Control (Microsoft Windows XPe) 

Timer

- Digital 

Generator

Frequencies:       40 kHz: Power 0 - 30 W; 0 - 100 W
                       13,56 MHz: Power 0 - 50 W

Vacuum pump

- in different sizes from different manufacturers
  (As required with active carbon filter)