Yocto (low cost system)

The Yocto III unit is mainly used for the following applications:

• Cleaning
• Activation

Give us a call and we will be happy to advise you. Phone: +49 (0) 7458/999 31-0 

Basic Equipment

- Power supply: 230 V / 50 – 60 Hz

Gas Supply

- One process gas through filter
- Flow through valve (not adjustable)
- Ventilation through filter

Vacuum Chamber

- Borosilicate glass (UHP) round with lid (approx. Ø 50 mm, L 150 mm) 

Electrodes

- One pair of electrode on the outside of the vacuum chamber

Control

- Generator for plasma generation
- 2 step switch
- Start button
- Power switch 

Generator

- Frequency: 100 kHz
- Power 0 – 30 W

Vacuum Pump

- Integrated into the system
- Dry vacuum pump (without oil)
- Suction power: 0,75 m³/h