ES373 Dry Etching fine IC decapsulation systems

ES373 is Dry Etching System designed for Advanced LSI with Fine Process. It has superior functions and Ease of Use as system is specialized for LSI Failure Analysisthat has the capability for high aspect ratio etching on multi-layered devices. Memory function to store variable etching conditions.

Memory Function for Recipes & W-Step program Function

Saving the Etching condition, Easy Maintenance

Record of Operation History

Stage Temperature Control by Peltier Device

VCR Joint for Process Gas Pipe

Dry Pump is also available