MDA-400LJ Fully Manual Mask Laigner

MDA-400LJ from MIDAS SYSTEM (Korea) fully manual mask aligner. 

Easy operation & Installation , Handling Substrates of Various sizes , Adopt UV-LED exposure module , UV-LED Life-time is long

Aligner accuracy - 1 micron. 
Wafers size up to 100 mm.
Manual alignment and exposure

• TypeFully - manual
• Mask size - up to 5 inch
• Substrate size - piece to 4 inch circle
• Uniform beam size - 125 mm circle
• UV light source - UV LED
• Beam wavelength - 365 nm
• Beam uniformity - <±3 %
• 365 nm intensity - ~ 20 mW/㎠
• Alignment method - manual
• Alignment accuracy - 1 um
• Process mode - Soft, Hard, Vacuum contact & Proximity
• Process resolution - 1 um @ 1 um PR thickness with vacuum contact
• Dimensions (mm) - 800(W) * 800(D) * 800(H)