MDA-400M Manual Mask Aligner

MDA-400M from MIDAS SYSTEM (Korea) fully manual. 

Easy operation & Installation , Handling Substrates of Various sizes , PLC control with Touch screen panel

Alignment accuracy - 1 micron. 
ОWafers up to 150 mm.
Mask Mask size: 127х127 mm (5х5 inches)
Manula aligment and auto exposure

Specification

• Type - Fully manual
• Mask size - up to 5 inch
• Substrate size - piece to 4 inch circle
• Uniform beam size - 4.25 * 4.25 inch
• UV light source - UV Lamp, 350 W
• Beam wavelength - 350 ~ 450 nm
• Beam uniformity - <±3 %
• 365 nm intensity - ~ 25 mW/㎠
• Alignment method - manual
• Alignment accuracy - 1 um
• Process mode - Soft, Hard, Vacuum contact & Proximity
• Process resolution - 1 um @ 1 um PR thickness with vacuum contact
• Dimensions (mm) - 1080(W) * 1060(D) * 1580(H)