MDA-40FA / MDA-80FA / MDA-12FA - Fully auto mask aligner

MDA-40FA / MDA-80FA / MDA-12FA from MIDAS SYSTEM (Korea) - Fully auto mask aligner.

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Microscope position control system , Auto Align mark searching function.

BSA - option 
Wafers up to: до 50, 100 mm / 150, 200mm. / 200, 300 mm.
Fully Auto Alignment anf Fully Auto Exposure. Casset to Cassete

Specification for MDA-40FA

• Type - Full automatic
• Mask size - up to 5 inch
• Substrate size - 2 ~ 4 inch
• Uniform beam size - 6.25 * 6.25 inch
• UV light source - UV Lamp, 350 W
• Beam wavelength - 350 ~ 450 nm
• Beam uniformity - <±3 %
• 365 nm intensity - ~ 25 mW/㎠
• Alignment method - Full automatic
• Alignment accuracy - 1 um
• Process mode - Soft, Hard, Vacuum contact & Proximity
• Process resolution - 1 um @ 1 um PR thickness with vacuum contact