MDA-600LJ Fully Manual Mask Aligner
MDA-600LJ from MIDAS SYSTEM (Korea) fully manual mask aligner.
Easy operation & Installation , Handling Substrates of Various sizes , Adopt UV-LED exposure module , UV-LED Life-time is long
Aligner accuracy - 1 micron.
Wafers size up to 150 mm.
Manual alignment and exposure
SPECIFICATION
- TypeFully - manual
- Mask size - up to 7 inch
- Substrate size - piece to 6 inch circle
- Uniform beam size - 170 mm circle
- UV light source - UV LED
- Beam wavelength - 365 nm
- Beam uniformity - <±5 %
- 365 nm intensity - ~ 20 mW/㎠
- Alignment method - manual
- Alignment accuracy - 1 um
- Process mode - Soft, Hard, Vacuum contact & Proximity
- Process resolution - 1 um @ 1 um PR thickness with vacuum contact
- Dimensions (mm) - 800(W) * 800(D) * 800(H)
Request by email: info@minateh.ru