MDA-80SA / MDA-12SA - Semi-auotomatic Mask Aligner

MDA-80SA / MDA-12SA from MIDAS SYSTEM (Korea) -  Semi-auotomatic Mask Aligner. 

Easy operation UI , PLC Operation with PC control , Image grab & Data log , More than 100 Program recipes , Motorized joystick contro l, Motorized zoom microscope and stage.

• BSA with CCD camera (Option) 
• Wafer up to  200 mm/300mm
• Nanoimprint (Option)
• Semi-Automatic Stage moving during focus anf alignment, Auto Exposure. 

Specification

• Type - Joystick control Semi-Auto
• Mask size - up to 9 inch
• Substrate size - 6 ~ 8 inch
• Uniform beam size - 10.25 * 10.25 inch
• UV light source - UV Lamp, 2 kW
• Beam wavelength - 350 ~ 450 nm
• Beam uniformity - <±5 %
• 365 nm intensity - ~ 25 mW/㎠
• Alignment method - Joystick control Semi-Auto
• Alignment accuracy - 1 um
• Process mode - Soft, Hard, Vacuum contact & Proximity
• Process resolution - 1 um @ 1 um PR thickness with vacuum contact