SPIN-3000D Spin coater

SPIN-3000D from MIDAS SYSTEM (Korea) - Table Top Spin Coater. 

Touch panel control , Compact unit for various coating solutions , Programmable Recipe management , Easy operation , Adopt Drain , Exhaust hole in bowl
Wafers: from pieces 5х5 mm to wafers 150 mm

Specification

• Type - Spin coater system
• Substrate size - piece ~ up to 6 inch
• Spin speed - 300 ~ 7,000 rpm(@without load) an error of less than 3 %
• Spin recipe - 50 steps, 20 recipes
• Chuck material - Anodized AL, Acetal
• Bowl size - 12 inch
• Bowl material - Stainless steel
• Dispenser - No
• Weight (kg) - 30kg
• Dimensions (mm) - 390(W) * 570(D) * 280(H)