DAVID series - Fully Auto Wafers Track System

DAVID series manufactured by CND PLUS (South Korea) is Fully automatic track system for coating and developing a photoresist.

The automatic track system provides work with wafers up to 300 mm and square substrates up to 200x200 mm, simultaneous work with plates of two types 2-4 ”, 4-6”, 6-8 ”and 8-12” is also possible, the built-in climate system ensures stable microclimate parameters in the process chamber. The system meets all the technical requirements for applying thin-film and thick-film coatings and the manifestation of photoresist.
Cassette loading. FOUP cassette optional.

This system has high performance and low operating costs, flexible optional configuration options, a modular design allows you to complete each system for individual customer needs. The system is ideal for working with a stepper and automatic alignment settings.

• Automatic 2 sizes of wafer process at the same time.
• SEMI-S2 certification
• Various process application(LED, MEMS, Bumping, GaAs, Glass, Quartz…)
• Multi process flow
• Flexible system configuration
• High productivity and stability
• Design patent

Product facts

• Flexible modular design
• High Throughput (depends on the number of installed modules)
• Robot (wafers loader) of own production
• Own integrated climate system
• High uniformity across the wafer
• High wafer-to-wafer process reproducibility
• Installing a hot or cold plate to dry the resist
• Install HMDS
• Possibility to install WEE module for wafer's edge processing 
• EBR (Edge Bead Removal) roller removal module on the edge of the plate
• BSRN (Back Side Rinse Nozzle) backwash module
• Convenient and intuitive software for working with the system and creating ready-made recipes
• Compact design with center-mounted robot and cassettes
• Parallel streaming with substrates of different sizes allows optimal use of system power
• High quality application on square substrates without collecting photoresist in corners
• Up to 5 photoresist application / development modules
• Up to 18 hot / cold plates
• Optional FOUP cassette.
• Short delivery times and low cost