MINILAB - lithography mini laboratory

MINILAB is a fully equipped lithographic laboratory manufactured by MIDAS SYSTEM (Korea), which includes a Spin coater SPIN-1200T, a Hot plate for photosesist backing, and a station (generator) of deionized water.
The size of the substrates: from pieces of 5x5 mm to plates diam. 100 mm (up to 150 mm - optional)

The Minilab is equipped with a spin coater , hot plate, DI water system and process bath. This equipment can be effectly perfom Photo-lithography for piece to 4inch sample from University and Research center.

Consist of:
- Spin coater - SPIN-1200T
- Hot Plate
- DIW generator
- N2 and DIW guns
- Cabinet

Dimension1300(W) * 750(D) * 1800(H)

Request by email:  info@minateh.ru