SPIN-1200T from MIDAS SYSTEM (korea) - Table Top Spin Coater.
Touch panel control , Compact unit for various coating solutions , Programmable Recipe management , Easy operation
Wafers: from pieces 5х5 mm to wafers 100 mm (up tp 150 mm - with special fieture)
Specification
- Type - Spin coater system
- Substrate size - piece ~ up to 4 inch
- Spin speed - 300 ~ 7,000 rpm(@without load) an error of less than 3 %
- Spin recipe - 50 steps, 50 recipes
- Chuck material - Anodized AL, Acetal
- Bowl size - 8 inch
- Bowl material - polypropylene
- Dispenser - No
- Weight (kg) - 14 kg
- Dimensions (mm) - 230(W) * 340(D) * 260(H)