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SPIN-3000A Spin Coater

SPIN-3000A from MIDAS SYSTEM (Korea) - Table Top Spin Coater

Touch panel control , Compact unit for various coating solutions , Programmable Recipe management , Easy operation , Adopt Drain , Exhaust hole in bowl
Wafers: from pieces 5х5 mm to wafers 200 mm

Specification

  • Type-  Spin coater system
  • Substrate size - piece ~ up to 8 inch
  • Spin speed - 300 ~ 7,000 rpm(@without load) an error of less than 3 %
  • Spin recipe - 50 steps, 50 recipes
  • Chuck material - Anodized AL, Acetal
  • Bowl size - 12 inch
  • Bowl material - Stainless steel
  • Dispense - rNo
  • Weight (kg) - 30
  • Dimensions (mm) - 390(W) * 570(D) * 400(H)
Request by email:  info@minateh.ru