SPIN-4000A Spin coating or developing and drying

SPIN-4000A from MIDAS SYSTEM (Korea) for coating / developing a photoresist or drying with automatic dosing of a photoresist or developer and a programmer (touch screen display) for process control, creating recipes.

The size of the substrates: from pieces of 5x5 mm to plates diam. 300 mm

Specification

• Type- Spin coater/developing system
• Substrate size - 6 ~ 12 inch
• Spin speed - 300 ~ 5,000 rpm(@without load) an error of less than 3 %
• Spin recipe - 20 steps, 20 recipes
• Chuck material- Anodized AL, Acetal
• Bowl size - 18 inch
• Bowl material - Stainless steel
• Automatic Dispenser - Option