SRD cleanner - µSRD

SRD cleanner and dryer µSRD-150-B from Mot Semicon.

Системы SRD-отмывки и сушки имеют высокую производительность и обеспечивают качественный и экономичный отмыв и сушку пластин.  Корпус установок SRD The MOT SRD suits for all batch applications. The sophisti­cated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.

CORPUS

• Material: PP white or Stainless Steel
• optional PPs white, PVDF (with yellow card),
• Door material: PP white or PVC transpa­rent

KEY BENFITS

• Compliant designed for clean-room environment, easy to be integrated into Wet Bench systems.
• Easy-to-Use GUI operation that anyone can learn. The ope­rator only need to select the recipe.
• Economical and Efficient Quick ramp DC-motor integrated; the fully automated system provide excellent reliability.
• Flexible The MOT μSRD can be programmed to select indi­vidually or multiple different types of recipe within a single program; media dispense, rinse and spin events can also be programmed in any order desired. 

FLEXIBLE OPTIONS

• Customized Rotor Design possible
• Resistivity Monitor
• Anti Static with N2 purge
• DI-Heater
• DI water recirculation
• Extended Parts & Labor Warranty