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Минатех » English » Equipment » Technology equipment » Mask Aligners » MDA-400M-6 Manual Mask Aligner with PC/PLC control

MDA-400M-6 Manual Mask Aligner with PC/PLC control

Установка совмещения и экспонирования MDA-400M-6 с ручным управлением и PC/PLC контролем фото

MDA-400M-6 from MIDAS SYSTEM (Korea) - Manual Mask Aligner with PC/PLC control.

Easy operation & Installation , Handling Substrates of Various sizes , PLC Operation with PC control

  • Alignment accuracy - 1 micron. 
  • Wafers up to 150 mm (6 inches).
  • Max mask size:  178х178 mm (7х7 inches)
  • Manual Aligment and Auto Exposure
  • PC and PLC control

Specification

  • Type - Fully manual
  • Mask size - up to 7 inch
  • Substrate size - piece to 6 inch circle
  • Uniform beam size - 6.25 * 6.25 inch
  • UV light source - UV Lamp, 350 W
  • Beam wavelength - 350 ~ 450 nm
  • Beam uniformity - <±3 %
  • 365 nm intensity - ~ 25 mW/㎠
  • Alignment method - manual
  • Alignment accuracy - 1 um
  • Process mode - Soft, Hard, Vacuum contact & Proximity
  • Process resolution - 1 um @ 1 um PR thickness with vacuum contact
  • Weight (kg) - 150
  • Dimensions (mm) - 1080(W) * 1060(D) * 1580(H)
Download in PDF

Scheme of MDA-400M-6



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MDA-400M-6 Manual Mask Aligner with PC/PLC control

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